Mark A Franklin

Title: Mark A Franklin: Innovator in Plasma Technology

Introduction

Mark A Franklin is a notable inventor based in Scott's Valley, CA (US). He has made significant contributions to the field of semiconductor processing, holding a total of 6 patents. His work focuses on innovative methods for producing plasma, which is essential for various applications in semiconductor manufacturing.

Latest Patents

Franklin's latest patents include a "Plasma Initiating Assembly" and a "Method for Igniting Low Pressure Inductively Coupled Plasma." The Plasma Initiating Assembly is an apparatus designed to produce plasma suitable for semiconductor processing at low millitorr pressures. This apparatus features a vacuum chamber with a dielectric window, a planar coil positioned outside the chamber, and a plasma initiator within the chamber. The planar coil sustains the plasma through inductive power coupling once initiated. In one embodiment, the plasma initiator is a secondary electrode connected to a second RF power source. Additionally, the plasma initiator can ionize a portion of the process gas, enabling effective plasma generation.

Career Highlights

Mark A Franklin has been associated with LSI Logic Corporation, where he has contributed to advancements in plasma technology. His innovative approaches have paved the way for improved semiconductor processing techniques, enhancing the efficiency and effectiveness of manufacturing processes.

Collaborations

Franklin has collaborated with notable coworkers, including Nicholas F Pasch and Thomas G Mallon. Their combined expertise has fostered a collaborative environment that encourages innovation and the development of cutting-edge technologies.

Conclusion

Mark A Franklin's contributions to plasma technology and semiconductor processing are noteworthy. His patents reflect a commitment to innovation and excellence in the field. His work continues to influence the industry and drive advancements in semiconductor manufacturing.