Mario Kirsten

Title: The Innovative Contributions of Mario Kirsten

Introduction

Mario Kirsten is a notable inventor based in Potsdam, Germany. He has made significant contributions to the field of micromechanical components. His innovative approach has led to advancements in the fabrication of free-standing microstructures or membranes.

Latest Patents

Kirsten holds a patent for a method of fabricating micromechanical components with free-standing microstructures or membranes. This method involves initially depositing a sacrificial layer on a substrate, followed by the deposition of a polysilicon layer on the sacrificial layer through gaseous phase deposition. The process culminates in the partial removal of the sacrificial layer. The type of stress in the polysilicon layer is determined by the selected process pressure during deposition, while the stress value is set by the chosen process temperature. Notably, the process pressure exceeds the range typically used in LPCVD reactors. He has 1 patent to his name.

Career Highlights

Kirsten is associated with the Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V., a leading research organization in Germany. His work has been instrumental in advancing the field of micromechanics, showcasing his expertise and innovative thinking.

Collaborations

Throughout his career, Mario Kirsten has collaborated with esteemed colleagues such as Werner Riethmueller and Peter Lange. These collaborations have further enriched his research and contributions to the field.

Conclusion

Mario Kirsten's innovative methods in the fabrication of micromechanical components highlight his significant role in advancing technology. His contributions continue to influence the field and inspire future innovations.