Company Filing History:
Years Active: 1983-1990
Title: Innovations by Mario A. Maldari
Introduction
Mario A. Maldari is an accomplished inventor based in Stow, MA (US). He has made significant contributions to the field of particle detection technology. With a total of 3 patents, his work has advanced the methods used to identify particles on surfaces, particularly in semiconductor applications.
Latest Patents
Maldari's latest patents include a particle detection method and apparatus. This invention discloses an apparatus and method for detecting the presence of particles on the surface of an object, such as the front side of a patterned semiconductor wafer. A collimated beam of light is directed onto an area on the surface of the object at a grazing angle of incidence. A detector positioned above the surface detects light scattered from any particles present, while avoiding specularly reflected light. The output from the detector is processed by a computer and displayed for analysis. The surface is prepositioned relative to the incident light beam to minimize diffracted light from the surface and its pattern. The object is then moved translationally to examine the entire surface or selected portions, one area at a time.
Another patent by Maldari also focuses on a particle detection method and apparatus. In this version, a vertically expanded, horizontally scanning beam of light is directed onto the surface at a grazing angle of incidence. A video camera positioned above detects scattered light from particles, again avoiding specular reflections. The surface is angularly prepositioned relative to the incident light beam to minimize diffracted light. The object is moved translationally to allow examination of the entire surface or selected areas.
Career Highlights
Throughout his career, Mario A. Maldari has worked with notable companies such as Inspex, Inc. and Hamamatsu Systems, Inc. His experience in these organizations has contributed to his expertise in particle detection technologies.
Collaborations
Maldari has collaborated with several professionals in his field, including Charly D. Allemand and Hitoshi Iida. These collaborations have likely enriched his work and led to innovative advancements in particle detection.
Conclusion
Mario A. Maldari's contributions to particle detection technology have made a significant impact in the semiconductor industry. His innovative patents and collaborations highlight his expertise and dedication to advancing this important field.
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