Marianne Mechbach

Title: The Innovations of Inventor Marianne Mechbach

Introduction

Marianne Mechbach, an accomplished inventor based in Sollentuna, Sweden, has made significant contributions to the field of pressure sensing technology. With a portfolio of two patents, her innovative approaches have enhanced the functionality and sensitivity of pressure sensors, showcasing her expertise and commitment to advancing engineering solutions.

Latest Patents

One of Mechbach's latest patents revolves around a novel method for manufacturing a pressure sensor. This invention involves creating a recess in a lower silicon substrate that forms an integral part of the sensor's cavity. By bonding a Silicon On Insulator (SOI) wafer, which features a monocrystalline silicon layer on top of a substrate, to the lower silicon substrate, the recess is effectively closed, forming the essential sensor cavity. The process includes etching away the supporting substrate of the SOI-wafer, which leads to the formation of the sensor diaphragm from the monocrystalline layer above the recess.

The oxide layer present in the SOI-wafer serves as an ideal etch stop during the removal of the substrate wafer, ensuring a diaphragm with a precisely defined and uniform thickness. To finalize the sensor, an opening is created to evacuate the cavity, which is then sealed using Low-Pressure Chemical Vapor Deposition (LPCVD). Furthermore, sensor paths designed for detecting the deflection of the diaphragm are applied to either the outer or inner surface of the diaphragm. This advanced construction not only provides excellent long-term stability but also enhances sensitivity by allowing portions of the sensor paths to extend freely, unsupported, through specialized etching processes.

Career Highlights

Marianne has established herself as a key player at Silex Microsystems AB, where her work focuses on advancing microelectromechanical systems (MEMS). Her innovative spirit reflects the company’s mission to push the boundaries of technology in sensor manufacturing. Mechbach's expert understanding of materials and processes is evident through the impressive quality and reliability of her inventions.

Collaborations

Throughout her career, Marianne has collaborated with talented individuals such as Pelle Rangsten and Edvard Kalvesten. These partnerships have played a critical role in the development of her inventions, as working alongside experienced colleagues fosters an environment of creativity and knowledge sharing.

Conclusion

Marianne Mechbach stands out as a remarkable inventor whose contributions to pressure sensor technology offer groundbreaking advancements. With her innovative approaches and collaborative spirit, she continues to influence the engineering landscape, making her a key figure within Silex Microsystems AB and the wider scientific community. Her ongoing work promises to deliver even more advancements, pushing the boundaries of how we understand and utilize pressure sensing technologies.