Maria L Tenorio

Title: Maria L Tenorio: Innovator in Micro Hermetic Sensor Technology

Introduction

Maria L Tenorio is a distinguished inventor based in Gardena, CA (US). She has made significant contributions to the field of sensor technology, particularly with her innovative work on micro hermetic sensors. Her expertise and dedication to advancing technology have positioned her as a notable figure in her industry.

Latest Patents

Maria L Tenorio holds a patent for a micro hermetic sensor. This sensor assembly is designed to determine whether a hermetically sealed cavity between opposing substrate wafers in a wafer level packaged (WLP) chip is leaking. The assembly includes a thermal insulating layer within the cavity, along with a heater and temperature sensor deposited on the insulation layer. The thermal insulating layer is made from a suitable dielectric material compatible with WLP and MMIC fabrication processes, such as benzocyclobutene (BCB) or polyimide. The sensor operates by responding to a current that heats the thermal insulation layer, allowing the heat dissipated by the layer to be drawn away by gas between the layer and the substrate, which ultimately determines the temperature of the sensor.

Career Highlights

Maria is currently employed at Northrop Grumman Systems Corporation, where she continues to innovate and develop advanced technologies. Her work has garnered attention for its potential applications in various industries, including electronics and aerospace.

Collaborations

Throughout her career, Maria has collaborated with talented individuals such as Chunbo Zhang and Xianglin Zeng. These partnerships have contributed to the success of her projects and the advancement of sensor technology.

Conclusion

Maria L Tenorio is a pioneering inventor whose work in micro hermetic sensor technology exemplifies innovation and dedication. Her contributions continue to impact the field and inspire future advancements in sensor applications.