Company Filing History:
Years Active: 2010-2013
Title: The Innovations of Marek Zwyno
Introduction
Marek Zwyno is a notable inventor based in San Jose, California. He has made significant contributions to the field of substrate support apparatus and methods. With a total of 2 patents to his name, his work showcases innovative solutions in the realm of dynamic compensation for substrate chucks.
Latest Patents
Marek Zwyno's latest patents include a Z-stage with a dynamically driven stage mirror and chuck assembly. This invention discloses methods for substrate support apparatus that allow for the motion of a substrate chuck relative to a stage mirror to be dynamically compensated. By sensing the displacement of the substrate chuck and coupling a proportional signal in feedback loops with Z stage actuators and/or XY stage actuators, the system enhances precision. The substrate support apparatus may also feature a Z stage plate, a stage mirror, and actuators that impart movement in a Z direction while scanning in a plane perpendicular to that direction. The actuators may include force flexures designed to optimize the movement and stability of the substrate chuck.
Career Highlights
Marek Zwyno is currently employed at KLA-Tencor Technologies Corporation, where he continues to innovate and develop advanced technologies. His work has been instrumental in enhancing the capabilities of substrate support systems, contributing to the efficiency and accuracy of various applications.
Collaborations
Marek has collaborated with notable coworkers such as Salam Harb and Kent Douglas. Their combined expertise has fostered an environment of innovation and creativity within their projects.
Conclusion
Marek Zwyno's contributions to the field of substrate support apparatus demonstrate his commitment to innovation and excellence. His patents reflect a deep understanding of dynamic systems and their applications in technology.