Marco Mohr

Title: Marco Mohr - Innovator in Direct Liquid Injection Systems

Introduction

Marco Mohr is a notable inventor based in Ortenberg, Germany. He has made significant contributions to the field of chemical processing through his innovative designs and patents. His work primarily focuses on enhancing the efficiency of thin film deposition techniques.

Latest Patents

Marco Mohr holds a patent for a "Direct liquid injection system for thin film deposition." This apparatus is designed for the direct liquid injection (DLI) of chemical precursors into a processing chamber. The system includes a vaporizer assembly with an injection valve that receives a liquid reactant, vaporizes it, and delivers the vaporized liquid reactant. The injection valve features a valve body with an interior region, a gas inlet port, a liquid inlet port, and a vapor outlet port, all in fluid communication. The vaporizer assembly is equipped with a first inlet line connected to a liquid source and a second inlet line connected to a carrier gas source, with a heater positioned between the two ends.

Career Highlights

Marco Mohr is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in the field of materials engineering. His expertise in direct liquid injection systems has positioned him as a key player in advancing thin film deposition technologies.

Collaborations

Some of Marco's coworkers include Subramanya P Herle and Vicente M Lim, who contribute to the collaborative environment at Applied Materials, Inc. Their combined efforts enhance the research and development of cutting-edge technologies.

Conclusion

Marco Mohr's contributions to the field of thin film deposition through his innovative patent demonstrate his commitment to advancing chemical processing technologies. His work continues to influence the industry and inspire future innovations.