Company Filing History:
Years Active: 2023
Title: Manus Wong - Innovator in Electrostatic Chuck Technology
Introduction
Manus Wong is a notable inventor based in Shanghai, China. He has made significant contributions to the field of micro-fabrication equipment, particularly with his innovative designs and patents.
Latest Patents
Manus Wong holds a patent for a lift pin assembly, an electrostatic chuck, and a processing apparatus where the electrostatic chuck is located. This patent discloses a lift pin assembly that includes a lift pin and a lift pin receiving channel connected to a pressure control device. One end of the lift pin receiving channel is proximal to a wafer and is equipped with a sealing ring. The upper surface of the sealing ring contacts the back face of the wafer during processing, preventing gas from entering the lift pin receiving channel. This design allows the pressure control device to independently manage the pressure in the lift pin receiving channel.
Career Highlights
Manus Wong is currently employed at Advanced Micro-Fabrication Equipment Inc. in China. His work focuses on advancing technologies that enhance the efficiency and effectiveness of micro-fabrication processes.
Collaborations
Some of Manus Wong's coworkers include Tuqiang Q Ni and Rubin Ye. Their collaborative efforts contribute to the innovative environment at Advanced Micro-Fabrication Equipment Inc.
Conclusion
Manus Wong's contributions to electrostatic chuck technology and micro-fabrication equipment highlight his role as a key inventor in the industry. His patent reflects a commitment to innovation and efficiency in processing technologies.