This inventor holds 1 USPTO granted patent. Top assignee: International Business Machines Corporation. Active years: 2001.
Company Filing History:
Years Active: 2001
Title: Innovations by Manmohanjit Singh
Introduction
Manmohanjit Singh is an accomplished inventor based in San Jose, California. He has made significant contributions to the field of plasma processes through his innovative patent. His work focuses on enhancing the efficiency and accuracy of etching and deposition processes in semiconductor manufacturing.
Latest Patents
Manmohanjit Singh holds a patent titled "Method and apparatus for in-situ monitoring of ion energy distribution for endpoint detection via capacitance measurement." This invention provides a method and apparatus for in-situ monitoring of both the ion flux and the ion energy distribution during plasma processes. It plays a critical role in determining the endpoint of the etch process and ensuring the integrity and reproducibility of the deposition process. The patent features a capacitance sensor that measures ion flux and ion distribution, which is essential for optimizing plasma reactor performance.
Career Highlights
Manmohanjit Singh is associated with International Business Machines Corporation (IBM), where he applies his expertise in plasma technology. His innovative approach has contributed to advancements in semiconductor manufacturing processes, making them more efficient and reliable.
Collaborations
Throughout his career, Manmohanjit Singh has collaborated with notable colleagues, including Paul Matthew Lundquist and Son Van Nguyen. These collaborations have fostered a productive environment for innovation and development in their respective fields.
Conclusion
Manmohanjit Singh's contributions to the field of plasma processes through his patent demonstrate his commitment to innovation and excellence. His work continues to impact the semiconductor industry positively.