Mankyu Kang

Title: Mankyu Kang - Innovator in Extreme Ultraviolet Exposure Technology

Introduction

Mankyu Kang is a notable inventor based in Suwon-si, South Korea. He has made significant contributions to the field of extreme ultraviolet (EUV) exposure technology. His innovative work has led to the development of a unique patent that enhances the efficiency and effectiveness of EUV exposure apparatus.

Latest Patents

Mankyu Kang holds a patent for a reticle in an apparatus for extreme ultraviolet exposure. This patent describes a reticle that includes a substrate with an edge region and a main region. The design features a multi-layer structure on both the main and edge regions, with a sidewall of the multi-layer structure overlying the edge region. Additionally, a capping layer covers the upper surface and sidewall of the multi-layer structure, along with an absorber layer that covers the entire upper surface of the capping layer on the edge region of the substrate. This innovative stacked structure enhances the performance of EUV exposure systems.

Career Highlights

Mankyu Kang is currently employed at Samsung Electronics Co., Ltd., a leading technology company known for its advancements in electronics and innovation. His work at Samsung has allowed him to collaborate with other talented professionals in the field.

Collaborations

Some of Mankyu Kang's coworkers include Hoon Tae Kim and Jongkeun Oh. Their collaborative efforts contribute to the ongoing advancements in EUV technology and related fields.

Conclusion

Mankyu Kang's contributions to the field of extreme ultraviolet exposure technology through his innovative patent demonstrate his expertise and commitment to advancing technology. His work at Samsung Electronics Co., Ltd. and collaborations with fellow professionals further highlight his impact in the industry.