Mamoru Endo

Title: Mamoru Endo: Innovator in Quartz Glass Technology

Introduction

Mamoru Endo is a notable inventor based in Fukushima, Japan. He has made significant contributions to the field of quartz glass technology, particularly in applications related to semiconductor manufacturing. With a total of 3 patents, his work focuses on enhancing the performance and durability of materials used in high-tech environments.

Latest Patents

One of Mamoru Endo's latest patents is for a quartz glass that exhibits excellent resistance against plasma corrosion. This innovation is particularly relevant for use as a jig material in plasma reactions during semiconductor production. The quartz glass developed by Endo is designed to withstand corrosion from fluorine-based plasma gases, ensuring that it does not cause anomalies to silicon wafers. The patent details a composition of quartz glass containing 0.1 to 20 wt % of two or more types of metallic elements. These elements include at least one selected from Group 3B of the periodic table and another from a specified group of metallic elements, with strict concentration limits to maintain performance.

Career Highlights

Throughout his career, Mamoru Endo has worked with Shin-Etsu Quartz Products Co., Ltd., where he has furthered his research and development in quartz glass applications. His expertise in this niche area has positioned him as a key figure in advancing materials used in semiconductor technology.

Collaborations

Mamoru Endo has collaborated with notable professionals in his field, including Nobumasa Yoshida and Tatsuhiro Sato. These collaborations have contributed to the development of innovative solutions in quartz glass technology.

Conclusion

Mamoru Endo's contributions to quartz glass technology highlight his role as an influential inventor in the semiconductor industry. His patents reflect a commitment to improving material performance, which is essential for advancing technology in this critical field.