Maarten P DeBoer

Title: Innovative Contributions of Maarten P DeBoer

Introduction

Maarten P DeBoer is a notable inventor based in Albuquerque, NM, whose innovative work has led to the development of advanced technologies in the field of MEMS (Micro-Electro-Mechanical Systems). With three patents to his name, DeBoer's inventions hold significant implications for microscopy and quality control in MEMS applications.

Latest Patents

One of DeBoer's latest patents is a long working distance interference microscope. This invention is particularly noteworthy as it is designed for three-dimensional imaging and metrology of MEMS devices, making it suitable for use on standard microelectronics probe stations. The microscope's long working distance of 10-30 mm enables the utilization of standard probes or probe cards, allowing for the acquisition of nanometer-scale 3-D height profiles of MEMS test structures across an entire wafer. A standout feature of this microscope is that it does not require a well-matched pair of reference and sample objectives, significantly reducing overall costs compared to traditional Linnik microinterferometers.

Another significant patent from DeBoer is the method and system for automated on-chip material and structural certification of MEMS devices. This innovative approach enhances MEMS quality control and materials characterization through a combined measurement and mechanical response modeling strategy. It involves co-fabricating simple test structures alongside the MEMS devices, designed to isolate specific physical responses, enabling straightforward interpretation of their behavior under applied stress for quality control and material properties assessment.

Career Highlights

Maarten P DeBoer is affiliated with Sandia Corporation, where he has been instrumental in driving forward the development and application of technologies that enhance MEMS device certification. His efforts have contributed to improved precision and reliability in microfabrication processes.

Collaborations

Throughout his career, DeBoer has collaborated with prominent colleagues including Michael B Sinclair and Norman Frank Smith. Their combined expertise underscores the innovative spirit at Sandia Corporation and fosters a collaborative environment that supports groundbreaking research and invention.

Conclusion

Maarten P DeBoer's inventive contributions have significant implications for the field of MEMS, particularly in enhancing quality control and imaging techniques. His work not only reflects the essence of innovation but also sets a benchmark for future research and development in this critical technology area.