The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2003
Filed:
Apr. 19, 2000
Applicant:
Inventors:
Michael B. Sinclair, Albuquerque, NM (US);
Maarten P. DeBoer, Albuquerque, NM (US);
Norman F. Smith, Albuquerque, NM (US);
Brian D. Jensen, Ann Arbor, MI (US);
Samuel L. Miller, Albuquerque, NM (US);
Assignee:
Sandia Corporation, Albuquerque, NM (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G06F 1/900 ; H01L 2/940 ;
U.S. Cl.
CPC ...
G06F 1/900 ; H01L 2/940 ;
Abstract
A new approach toward MEMS quality control and materials characterization is provided by a combined test structure measurement and mechanical response modeling approach. Simple test structures are cofabricated with the MEMS devices being produced. These test structures are designed to isolate certain types of physical response, so that measurement of their behavior under applied stress can be easily interpreted as quality control and material properties information.