Company Filing History:
1 out of 916 
1 out of 13,741 
Years Active: 2016-2024
Title: Luigi G Amato: Innovator in Ion Source Technology
Introduction
Luigi G Amato is a notable inventor based in Hampton Falls, NH (US). He has made significant contributions to the field of ion source technology, holding 2 patents that showcase his innovative spirit and technical expertise.
Latest Patents
One of his latest patents is titled "Shield for filament in an ion source." This invention discloses a Bernas ion source equipped with a shield that is strategically placed between the filament and the chamber's first end. The shield serves to confine the plasma, enhancing the efficiency of the ion source. It can be electrically connected to the negative leg of the filament, making it the most negatively biased component in the chamber. In some embodiments, the shield may be electrically floating, allowing it to self-bias. Typically made of refractory metal, this shield reduces back heating of the filament by the plasma, minimizing the risk of thermal runaway and enabling the generation of denser plasmas within the chamber.
Another significant patent by Amato is "Mechanical alignment of substrates to a mask." This invention involves a mask frame with multiple masks attached to its underside. Each mask can independently move in three directions relative to the mask frame, allowing for precise alignment with respective alignment pins on a working surface. The masks are attached using fasteners that permit vertical movement, and they may also feature kinematic elements for optimal alignment.
Career Highlights
Throughout his career, Luigi G Amato has worked with prominent companies in the semiconductor industry, including Varian Semiconductor Equipment Associates, Inc. and Applied Materials, Inc. His experience in these organizations has contributed to his expertise in developing innovative technologies.
Collaborations
Amato has collaborated with notable professionals in his field, including Aaron Webb and Charles T Carlson. These collaborations have likely enriched his work and contributed to the advancements in ion source technology.
Conclusion
Luigi G Amato's contributions to ion source technology through his patents and career achievements highlight his role as an influential inventor. His innovative solutions continue to impact the field, showcasing the importance of creativity and technical knowledge in advancing technology.