This inventor holds 1 USPTO granted patent and 6 published patent applications. Top assignee: Novellus Systems Incorporated. Active years: 2015.
Company Filing History:
Years Active: 2015
Title: Innovations of Lucas B Henderson
Introduction
Lucas B Henderson is an accomplished inventor based in Rotterdam, NY (US). He has made significant contributions to the field of semiconductor technology, particularly through his innovative patent related to soft annealing processes.
Latest Patents
Henderson holds a patent for a process known as "Post-deposition soft annealing." This method focuses on reducing internal stress in silicon layers of a workpiece. The soft anneal process is particularly beneficial in reducing compressive stress, which can lead to issues such as wafer bow in stacks containing multiple silicon layers. This innovative approach allows for the reduction of internal stress without activating the silicon in the stack.
Career Highlights
Lucas B Henderson is associated with Novellus Systems Incorporated, a company known for its advancements in semiconductor manufacturing technology. His work has contributed to the development of more efficient processes in the industry.
Collaborations
Henderson has collaborated with notable colleagues, including Dong Niu and Joseph Lindsey Womack, to further enhance the innovations in his field.
Conclusion
Lucas B Henderson's contributions to semiconductor technology through his patent on soft annealing processes exemplify the impact of innovative thinking in reducing internal stress in silicon layers. His work continues to influence advancements in the industry.