Location History:
- Champaign, IL (US) (2018)
- Santa Clara, CA (US) (2022)
Company Filing History:
2 out of 2,355 
1 out of 13,741 
1 out of 4,555 
Years Active: 2018-2022
Title: Lu Xu: Innovator in Carbon Hardmask Films and Solar Concentrators
Introduction
Lu Xu is a prominent inventor based in Santa Clara, CA, known for his contributions to the fields of materials science and renewable energy. He holds a total of 3 patents that showcase his innovative approaches to technology.
Latest Patents
One of Lu Xu's latest patents involves nitrogen-doped carbon hardmask films. This invention discloses a method and apparatus for forming carbon hard masks that improve deposition uniformity and etch selectivity. The carbon hard mask is created in a PECVD process chamber using a nitrogen-containing gas, an argon-containing gas, and a hydrocarbon gas. Another significant patent focuses on luminescent solar concentrators and related manufacturing methods. This invention aims to minimize photon thermalization losses and incomplete light trapping by utilizing cadmium selenide core and cadmium sulfide shell quantum dot technology. The design incorporates various components and techniques to enhance photon collection efficiency, including top and bottom spectrally-selective filters.
Career Highlights
Lu Xu has worked with notable organizations such as the University of Illinois and Applied Materials, Inc. His work has significantly impacted the development of advanced materials and renewable energy technologies.
Collaborations
Throughout his career, Lu Xu has collaborated with esteemed colleagues, including Ralph G. Nuzzo and Xiaoquan Min, who is a woman. These collaborations have further enriched his research and innovations.
Conclusion
Lu Xu's contributions to the fields of carbon hardmask films and solar concentrators highlight his role as a leading inventor in technology. His innovative patents and collaborations continue to influence advancements in materials science and renewable energy.