Lu Tian

Title: Lu Tian: Innovator in Photolithography and Optical Technologies

Introduction

Lu Tian is a prominent inventor based in Palo Alto, California, known for her significant contributions to the fields of photolithography and optical technologies. With a total of nine patents to her name, she has made remarkable advancements that have implications in various technological applications.

Latest Patents

Among her latest patents is a groundbreaking system for generating two-dimensional patterns using multiple exposures of one-dimensional photolithography masks or holographic interference lithography. This innovative method involves exposing a photoresist layer through a first exposure to a unidimensional series of features, which alternately provide minima and maxima of illumination intensity along a first dimension. Subsequently, the photoresist layer is exposed again to a second unidimensional series of features, which provides a similar pattern along a second dimension, angularly separated by an exposure rotation factor. Another notable patent is the zoned optical waveplate, which features a series of transversely stacked birefringent zones alternating with non-birefringent zones. This design is integrally formed on an anti-reflective coated face of a single substrate, utilizing zero-order sub-wavelength form-birefringent gratings to achieve a target retardance.

Career Highlights

Lu Tian has worked with several esteemed companies, including Lumentum Operations LLC and Google Inc. Her experience in these organizations has allowed her to refine her skills and contribute to cutting-edge projects in the field of optics and photonics.

Collaborations

Throughout her career, Lu has collaborated with notable colleagues, including John Michael Miller and Michael O'Leary. These partnerships have fostered an environment of innovation and creativity, leading to the development of advanced technologies.

Conclusion

Lu Tian's work exemplifies the spirit of innovation in the realm of photolithography and optical technologies. Her patents and collaborations reflect her commitment to advancing the field and her impact on the industry is undeniable.