Lu Liu

Title: Innovations by Inventor Lu Liu in Plasma Technology

Introduction

Lu Liu is an accomplished inventor based in San Jose, California, known for her significant contributions to plasma technology, boasting a total of six patents. Her inventive spirit has led to advancements in methods and apparatus for plasma generation and cleaning processes used in various applications.

Latest Patents

Lu Liu's latest patents showcase her expertise and innovative thinking. One of her notable inventions is titled "Methods and Apparatus for Toroidal Plasma Generation." This patent describes an advanced technique for forming plasma in a process chamber, utilizing an annular exciter connected to an RF power source and an annular applicator designed to create a resonant circuit. The innovation allows for the generation of azimuthal plasma, enhancing the efficiency of plasma processing.

Another of her recent patents, "Situ Clean for Bevel and Edge Ring," focuses on a method for cleaning beveled areas within a plasma processing chamber. This method details how a cover substrate is placed in the chamber, where a cleaning gas is introduced, and plasma is struck within the chamber. Such processes are critical for maintaining substrate integrity and efficiency in semiconductor manufacturing.

Career Highlights

In her professional journey, Lu Liu has contributed her expertise to prominent technology companies, including Applied Materials, Inc. and Nvidia Corporation. Her work in these organizations has enabled her to play a key role in developing innovative solutions that cater to the evolving needs of the technology sector.

Collaborations

Throughout her career, Lu has had the opportunity to collaborate with talented individuals such as Andrew Nguyen and David Cook, further enhancing her professional network. These collaborations have helped in refining her research and fostering innovative approaches to complex engineering challenges.

Conclusion

Lu Liu's remarkable contributions to plasma technology through her numerous patents underline her position as a leading inventor in her field. Her innovative solutions not only advance technological boundaries but also have practical applications that can significantly impact various industries.