Company Filing History:
Years Active: 2024
Title: The Innovations of Longbao Chen in Plasma Processing Technology
Introduction
Longbao Chen, an inventive mind based in Shanghai, China, has made significant contributions to the field of plasma processing technology. His innovative work has led to the development of a patent that showcases his expertise and dedication to advancing technology in micro-fabrication.
Latest Patents
Longbao Chen holds a patent for his invention titled "Radio Frequency Electrode Assembly for Plasma Processing Apparatus." This patent discloses a sophisticated design that includes a radio frequency electrode assembly comprising a base with a first fluid passage, an electrostatic chuck, a focus ring, and a heat conducting ring. This assembly allows for effective heat conduction and the precise adjustment of polymer distribution on substrates during processing. The technology has potential applications in enhancing the quality and efficiency of plasma processing equipment.
Career Highlights
Longbao Chen is affiliated with Advanced Micro-Fabrication Equipment Inc. (AMEC), a leading company in the field of micro-fabrication technology. His work at AMEC highlights his commitment to innovation and his role in developing advanced technologies that are crucial for semiconductor manufacturing. Through his expertise, Chen aims to improve processes that are integral to the tech industry.
Collaborations
Throughout his career, Chen has collaborated with talented colleagues, such as Jie Liang and Weina Wang. These partnerships have fostered an environment of creativity and shared knowledge, enabling the development of pioneering solutions in plasma processing technology.
Conclusion
Longbao Chen's contributions to plasma processing apparatus have demonstrated a remarkable blend of creativity and technical skill. With a patent highlighting his innovative approach, his work has set a standard for advancements in micro-fabrication. As a key player at Advanced Micro-Fabrication Equipment Inc. in Shanghai, Chen continues to inspire innovation in the technology sector.
Inventor’s Patent Attorneys refers to legal professionals with specialized expertise in representing inventors throughout the patent process. These attorneys assist inventors in navigating the complexities of patent law, including filing patent applications, conducting patent searches, and protecting intellectual property rights. They play a crucial role in helping inventors secure patents for their innovative creations.