Long-Ming Lu

Title: Long-Ming Lu: Innovator in Extreme Ultraviolet Technology

Introduction

Long-Ming Lu is a prominent inventor based in Taipei, Taiwan. He is known for his contributions to the field of extreme ultraviolet (EUV) technology. His innovative work has led to the development of a unique patent that enhances the functionality of mask pods used in processing machines.

Latest Patents

One of Long-Ming Lu's notable patents is titled "Extreme Ultraviolet (EUV) Pod Having Marks." This invention relates to an EUV pod that includes a mask pod and one or more marks disposed on the mask pod. The invention utilizes sensors from a processing machine to detect these marks. By incorporating these marks, the surface roughness of specific regions of the mask pod can be altered, allowing for improved detection and processing capabilities. The sensors emit light to the mask pod, which reflects the light back to the sensors. This reflection enables the sensors to determine if the voltage generated falls within the designated ranges of the marks, confirming the correspondence between the sensors and the marks.

Career Highlights

Long-Ming Lu is associated with Gudeng Precision Industrial Co., Ltd., where he applies his expertise in EUV technology. His work at this company has significantly contributed to advancements in the field, showcasing his commitment to innovation and excellence.

Collaborations

Some of Long-Ming Lu's coworkers include Wei-Yen Chen and Cheng-Ju Lee. Their collaboration in the workplace fosters a creative environment that encourages the development of cutting-edge technologies.

Conclusion

Long-Ming Lu's contributions to extreme ultraviolet technology exemplify his innovative spirit and dedication to advancing the field. His patent on the EUV pod demonstrates the potential for improved processing capabilities in the industry.