Lixin Pei

Title: Lixin Pei: Innovator in Sputtering Technology

Introduction

Lixin Pei is a notable inventor based in Beijing, China. He has made significant contributions to the field of microelectronics through his innovative designs and patents. His work focuses on enhancing the efficiency and effectiveness of sputtering processes, which are crucial in semiconductor manufacturing.

Latest Patents

Lixin Pei holds a patent for a "Sputtering reaction chamber and process assembly of sputtering reaction chamber." This invention provides a sputtering reaction chamber that includes a process assembly designed to improve the cooling and processing of workpieces. The assembly features a liner with an integrally formed body member and a cover member that effectively presses the workpiece during processing. Additionally, a cooling channel is integrated into the assembly to manage heat radiation, thereby reducing defects and improving product yield. He has 1 patent to his name.

Career Highlights

Lixin Pei is currently employed at Beijing Naura Microelectronics Equipment Co., Ltd. His role involves developing advanced technologies that enhance the performance of microelectronic devices. His expertise in sputtering technology has positioned him as a key player in the industry.

Collaborations

Lixin Pei collaborates with talented professionals in his field, including Liren Han and Bing Li. These partnerships foster innovation and drive advancements in microelectronics.

Conclusion

Lixin Pei's contributions to sputtering technology exemplify his commitment to innovation in the microelectronics sector. His patent and collaborative efforts continue to influence the industry positively.