Liurui Li

Title: Innovations by Liurui Li in Substrate Support Technology

Introduction

Liurui Li is an accomplished inventor based in Santa Clara, CA (US). He has made significant contributions to the field of substrate support technology. His innovative approach has led to the development of a unique method and tool for securing support beads within substrate supports.

Latest Patents

Liurui Li holds a patent for a "Method and tool for restricting substrate a support bead inside an opening formed in a substrate support." This patent describes a method for securing a support ball in a substrate support, along with a tool for forming a capture lip in the substrate support. The invention provides a solution for retaining the support ball in an opening of the substrate support, which is crucial for applications in vacuum processing chambers. The method involves pressing a support ball into an opening, forming a capture lip that retains the ball, and setting an exposure height for the ball above the substrate support's surface.

Career Highlights

Liurui Li is currently employed at Applied Materials, Inc., a leading company in the semiconductor and display technology sectors. His work at Applied Materials has allowed him to focus on advancing technologies that enhance substrate support systems.

Collaborations

Liurui Li collaborates with various professionals in his field, including his coworker Songjae Lee. Their combined expertise contributes to the innovative projects at Applied Materials.

Conclusion

Liurui Li's contributions to substrate support technology exemplify the impact of innovative thinking in engineering. His patent reflects a commitment to improving processes in the semiconductor industry.