Liren Han

Title: Liren Han: Innovator in Sputtering Technology

Introduction

Liren Han is a prominent inventor based in Beijing, China. He has made significant contributions to the field of microelectronics through his innovative designs and patents. His work focuses on improving the efficiency and effectiveness of sputtering technology, which is crucial in various manufacturing processes.

Latest Patents

Liren Han holds a patent for a "Sputtering reaction chamber and process assembly of sputtering reaction chamber." This invention provides a sputtering reaction chamber that includes a process assembly designed to enhance the performance of sputtering operations. The assembly features a liner with an integrally formed body member and a cover member, which works to press the edge of a workpiece during processing. Additionally, a cooling channel is integrated into the design to manage heat effectively, thereby reducing defects and improving product yield.

Career Highlights

Liren Han is associated with Beijing Naura Microelectronics Equipment Co., Ltd., where he applies his expertise in microelectronics. His innovative approach has led to advancements in sputtering technology, making significant impacts on the industry. His dedication to research and development has positioned him as a key figure in his field.

Collaborations

Liren collaborates with talented professionals such as Bing Li and Keke Zhao. Together, they work on various projects that aim to push the boundaries of microelectronics and improve manufacturing processes.

Conclusion

Liren Han's contributions to sputtering technology exemplify the importance of innovation in the microelectronics industry. His patent and collaborative efforts continue to influence advancements in manufacturing, showcasing his role as a leading inventor in this field.