Company Filing History:
Years Active: 2000
Title: Innovations by Linda Leard
Introduction
Linda Leard is a prominent inventor based in San Jose, California. She has made significant contributions to the field of integrated circuit technology, holding two patents that showcase her expertise and innovative spirit. Her work has had a substantial impact on the development of advanced semiconductor processes.
Latest Patents
Linda's latest patents include a method for preventing micromasking in the shallow trench isolation process. This invention involves forming an isolation structure on an integrated circuit using a shallow trench isolation process. A layer of buffer oxide is formed on a substrate, followed by a layer of nitride. The layers are patterned to create a trench area, which is then subjected to a plasma comprising H₂O vapor and a gaseous fluorocarbon or fluorinated hydrocarbon gas to clean impurities. The substrate is subsequently etched to form a trench within the trench area.
Another notable patent is the integrated etch process for polysilicon/metal gate. This invention prepares a gate region of a transistor for receiving a deposit of metal. A chemical mechanical polishing process reduces the thickness of an insulation layer above the gate region. An etch process is then performed to remove the remaining portion of the insulating layer, as well as a portion of polysilicon within the gate region and the top portion of spacers on either side of the gate region. A polysilicon selective etch-back is conducted to remove an additional portion of the polysilicon.
Career Highlights
Linda Leard is currently employed at VLSI Technology, Inc., where she continues to innovate and contribute to the field of semiconductor technology. Her work has been instrumental in advancing the capabilities of integrated circuits, making her a valuable asset to her company and the industry.
Collaborations
Throughout her career, Linda has collaborated with notable colleagues, including Calvin T Gabriel and Ian Robert Harvey. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.
Conclusion
Linda Leard's contributions to the field of integrated circuits through her patents and work at VLSI Technology, Inc. highlight her role as a leading inventor in the technology sector. Her innovative methods continue to shape the future of semiconductor processes.