Liang Tang

Title: The Innovations of Liang Tang

Introduction

Liang Tang is a notable inventor based in San Jose, California. He has made significant contributions to the field of charged-particle beam inspection systems. His innovative work has led to the development of a unique patent that enhances the functionality of these systems.

Latest Patents

Liang Tang holds a patent for a "Leveling sensor in multiple charged-particle beam inspection." This invention discloses an improved leveling sensor and method for adjusting a sample height in a charged-particle beam inspection system. The improved leveling sensor comprises a light source configured to project a first pattern onto a sample. Additionally, a detector is configured to capture an image of the projected pattern after the first pattern is projected on the sample. The first pattern can comprise an irregularity to enable a determination of a vertical displacement of the sample.

Career Highlights

Liang Tang is currently employed at ASML Netherlands B.V., a leading company in the field of semiconductor manufacturing equipment. His work at ASML has allowed him to apply his innovative ideas in a practical setting, contributing to advancements in technology.

Collaborations

Some of his coworkers include Jian Zhang and Yan Wang, who collaborate with him on various projects within the company.

Conclusion

Liang Tang's contributions to the field of charged-particle beam inspection systems demonstrate his innovative spirit and dedication to advancing technology. His patent reflects a significant step forward in improving inspection methods, showcasing the importance of inventors in driving progress.