Liang Ouyang

Title: Innovations by Liang Ouyang

Introduction

Liang Ouyang is a notable inventor based in San Jose, California. He has made significant contributions to the field of physical vapor deposition systems. With a total of two patents to his name, Ouyang's work focuses on enhancing the efficiency and effectiveness of impedance matching networks.

Latest Patents

Ouyang's latest patents include a system for retuning impedance matching network control. This innovative physical vapor deposition system features an RF generator that transmits an AC process signal to a deposition chamber via an RF matching network. The controller of the RF matching network is designed to receive DC magnitude and phase error signals, allowing it to vary the impedance of the network accordingly. The matching network operates in a first mode until a tuning dead-zone is identified. Once this dead-zone is determined, the network transitions to additional modes until it is fully tuned. The controller utilizes a composite value of magnitude and phase error to drive the variable tuning and load capacitors. In certain instances, a blended mode may be implemented, which represents multiple tuning algorithms concurrently, thereby optimizing the tuning process.

Career Highlights

Liang Ouyang is currently employed at Comet Technologies USA, Inc. His role involves working on advanced technologies that push the boundaries of physical vapor deposition systems. His expertise in RF matching networks has positioned him as a key player in the field.

Collaborations

Ouyang collaborates with talented individuals such as Anthony Oliveti and Daniel Catalan. Together, they contribute to innovative projects that enhance the capabilities of their technologies.

Conclusion

Liang Ouyang's contributions to the field of physical vapor deposition systems and impedance matching networks demonstrate his commitment to innovation. His patents reflect a deep understanding of technology and its applications in modern industry.