Li-Shi Liu

Title: Innovations of Li-Shi Liu in Plasma Technology

Introduction

Li-Shi Liu is a prominent inventor based in Taipei, Taiwan. He has made significant contributions to the field of plasma technology, holding a total of six patents. His work focuses on developing advanced systems that enhance the efficiency and effectiveness of plasma generation.

Latest Patents

One of Li-Shi Liu's latest patents is the "Temperature-controlled plasma generation system." This innovative system features a dielectric window, an inductive coil, a gas distribution element, and a gas conditioning system. The gas distribution element is designed to discharge a thermally conditioned gas onto the dielectric window, effectively regulating the temperature across it. The gas conditioning system plays a crucial role by supplying the thermally conditioned gas to the gas distribution element.

Another notable patent is the "Grounding cap module and gas injection device." This invention includes a main body with a first opening and a grounding portion for electrical grounding. The frame portion aligns with the first opening, while the cap portion covers the second opening, creating a receiving cavity. This patent also encompasses a gas injection device and an etching apparatus that utilizes this innovative design.

Career Highlights

Li-Shi Liu is currently employed at Taiwan Semiconductor Manufacturing Company Limited, a leading firm in the semiconductor industry. His work at this prestigious company allows him to apply his innovative ideas and contribute to cutting-edge technology in semiconductor manufacturing.

Collaborations