Location History:
- Yorktown, NY (US) (1983)
- Yorktown Heights, NY (US) (1977 - 1996)
Company Filing History:
Years Active: 1977-1996
Title: The Innovative Contributions of Leon H Kaplan
Introduction
Leon H Kaplan is a notable inventor based in Yorktown Heights, NY (US). He has made significant contributions to the field of laser technology, holding a total of 9 patents. His work primarily focuses on the development of advanced laser ablation masks and methods of fabrication.
Latest Patents
Kaplan's latest patents include a laser ablation mask and a method of fabrication. This innovative mask features a pattern of clear areas and scattering areas, where the scattering areas are covered with randomly formed facets that act as scattering centers. The clear areas allow laser energy to pass through, while the scattering areas refract the energy, preventing sufficient laser energy from reaching the organic layer for ablation. The mask is created by depositing and patterning a metal mask layer on a quartz plate, ensuring that intended clear areas are protected.
Another significant patent involves the fabrication of laser ablation masks through wet etching. This process utilizes tantalum (or hafnium) oxide layers alternated with silicon oxide layers in a dielectric stack reflector type mask. The layers are wet etched at high temperatures using a caustic solution, which greatly enhances manufacturing yield compared to traditional methods like ion milling. High feature density is achieved through a two-step patterning process involving a chromium layer and an organic resist.
Career Highlights
Kaplan's career is marked by his association with the International Business Machines Corporation (IBM), where he has contributed to various innovative projects. His expertise in laser technology has positioned him as a key figure in the development of advanced manufacturing techniques.
Collaborations
Throughout his career, Kaplan has collaborated with notable colleagues, including Steven M Zimmerman and Richard D Kaplan. These collaborations have further enriched his work and contributed to the advancement of laser technology.
Conclusion
Leon H Kaplan's innovative contributions to laser technology and his numerous patents highlight his significant impact in the field. His work continues to influence advancements in manufacturing processes and laser applications.