This inventor holds 2 USPTO granted patents. Top assignee: International Business Machines Corporation. Active years: 1985-1988.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Location History:
- late of Berlin, VT (US) (1985)
- late of Binghamton, NY (US) (1988)
Company Filing History:
Years Active: 1985-1988
Title: The Innovations of Lawrence P. Hayes
Introduction
Lawrence P. Hayes was a notable inventor whose contributions to the field of semiconductor technology have left a lasting impact. He was based in Berlin, Vermont, and held a total of 2 patents during his career. His work primarily focused on the measurement and optical systems that enhanced the precision of semiconductor manufacturing processes.
Latest Patents
One of Hayes' significant patents involved the measurement of registration of overlaid test patterns. This innovative method utilized two identical test patterns overlaid on a planar substrate of semiconductor material. Each pattern consisted of spaced parallel lines arranged in horizontal and vertical sets. The lines were made of different materials, allowing for the calculation of overlay errors based on reflected light intensities. This technique provided a more accurate means of assessing the alignment of semiconductor layers.
Another notable patent was for an optical system with a diffuser designed to transform a collimated beam into a desired curved shape. This apparatus utilized a cylindrical lens and a cylindrical mirror to create a uniform intensity line source from an excimer laser. The resulting curved self-luminous distribution was particularly useful in various optical applications.
Career Highlights
Hayes worked at the International Business Machines Corporation (IBM), where he contributed to advancements in semiconductor technology. His innovative approaches to measurement and optical systems were instrumental in improving manufacturing processes within the industry.
Collaborations
Throughout his career, Hayes collaborated with several talented individuals, including Randall T. Kerth and Kantilal Jain. These partnerships fostered an environment of innovation and creativity, leading to significant advancements in their respective fields.
Conclusion
Lawrence P. Hayes was a pioneering inventor whose work in semiconductor technology has had a profound influence on the industry. His patents and collaborations reflect a commitment to innovation and excellence in engineering.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile