Company Filing History:
Years Active: 1987
Title: The Innovative Contributions of Lawrence F Bacchetti
Introduction
Lawrence F Bacchetti is a notable inventor based in Belmont, MA, who has made significant contributions to the field of electron beam optical systems. His work primarily focuses on enhancing the functionality and efficiency of these systems through innovative cleaning methods.
Latest Patents
Bacchetti holds a patent for a "Method and apparatus for in-situ plasma cleaning of electron beam." This invention provides a method and apparatus for in-situ cleaning of charged particle beam optical systems, such as electron microscopes and electron beam lithography systems. The process involves the use of a specially introduced plasma forming gas, like hydrogen, which is excited by applying a high voltage, high frequency excitation potential between various optical elements of the electron beam optical column. Alternatively, specially constructed separate plasma forming electrodes can be integrated into the optical system. During the cleaning operation, the plasma reacts chemically with contaminants on the surface of the optical elements, forming gaseous reactants that are subsequently pumped out of the system.
Career Highlights
Bacchetti has had a distinguished career, working at Control Data Corporation, where he has contributed to various projects and innovations in the field of electron beam technology. His expertise in plasma cleaning methods has positioned him as a key figure in advancing the capabilities of electron beam optical systems.
Collaborations
Throughout his career, Bacchetti has collaborated with notable colleagues, including David M Walker and Donald O Smith. These collaborations have further enriched his work and contributed to the development of innovative solutions in the field.
Conclusion
Lawrence F Bacchetti's contributions to the field of electron beam optical systems through his innovative patent demonstrate his commitment to advancing technology. His work continues to influence the industry and pave the way for future innovations.