Laurentius Johannes Adrianus Van Bokhoven

Title: Laurentius Johannes Adrianus Van Bokhoven: Innovator in Optical Heating Technologies

Introduction

Laurentius Johannes Adrianus Van Bokhoven is a notable inventor based in Bergeijk, Netherlands. He has made significant contributions to the field of optical technologies, particularly in the area of heating systems for optical components. With a total of 2 patents, his work has advanced the capabilities of lithographic apparatus and projection optics.

Latest Patents

One of his latest patents is focused on a multi-channel light source for projection optics heating. This innovation provides systems, apparatuses, and methods for heating a plurality of optical components. The method involves receiving an input radiation beam from a radiation source and generating multiple output radiation beams based on this input. These output beams are then transmitted towards heater head optics designed to heat the optical components. The method also includes controlling the power value and achieving a flat-top far-field profile for each output beam.

Another significant patent involves a lithographic apparatus that integrates a temperature sensor and a fiber Bragg grating sensor. This apparatus includes an illumination system and a projection system that projects an image of a pattern onto a substrate. The temperature-sensitive object is monitored by a temperature sensor that generates measurement signals based on the reflected spectra from scattering features. This innovation enhances the precision of lithographic processes by providing real-time temperature data.

Career Highlights

Laurentius is associated with ASML Netherlands B.V. and ASML Holding N.V., where he has played a crucial role in developing advanced optical technologies. His work has been instrumental in improving the efficiency and effectiveness of lithographic systems used in semiconductor manufacturing.

Collaborations

He has collaborated with notable colleagues such as Mahesh Upendra Ajgaonkar and Gerardus Hubertus Petrus Maria Swinkels. These collaborations have fostered innovation and contributed to the success of various projects within the company.

Conclusion

Laurentius Johannes Adrianus Van Bokhoven is a distinguished inventor whose work in optical heating technologies has made a significant impact in the field. His patents reflect a commitment to advancing technology and improving industrial processes.