Company Filing History:
Years Active: 1978-1985
Title: Larry L. Keutzer: Innovator in Ion Implantation and Ozone Generation
Introduction
Larry L. Keutzer is a notable inventor based in Austin, TX, with a focus on advancements in ion implantation systems and ozone generation technologies. He holds a total of 3 patents, showcasing his contributions to the field of engineering and technology.
Latest Patents
One of his significant inventions is the "Ion Implantation Control System." This control system is designed for an ion implantation system where wafers are mounted around the periphery of a rotating disk. The disk moves radially relative to an ion beam, allowing for the exposure of successive sections of each wafer to radiation. The system senses beam current passing through apertures in the disk, which is collected by a Faraday cup. This current is integrated to measure charge, which is then compared with a calculated value based on the desired ion dosage. The resultant controls the incremental steps of the rotating disk, ensuring that the entire surface of each wafer receives the proper ion dosage.
Another notable patent is the "Ozone Generation Apparatus and Method." This invention provides a method and apparatus for generating large quantities of singlet oxygen and/or ozone at unexpectedly high efficiencies. An electron beam generated by a hollow cathode plasma discharge device is spread over an electron-transmissive window, through which an oxygen-containing atmosphere flows at high velocity.
Career Highlights
Throughout his career, Larry has worked with several companies, including Accelerators, Inc. and Veeco/ai, Inc. His work has significantly impacted the fields of ion implantation and ozone generation, leading to more efficient processes and technologies.
Collaborations
Larry has collaborated with notable individuals in his field, including F. Donald Orr, Jr. and Roger B. Gault. These collaborations have contributed to the advancement of his inventions and the development of innovative technologies.
Conclusion
Larry L. Keutzer's contributions to ion implantation and ozone generation technologies highlight his innovative spirit and dedication to engineering. His patents reflect a commitment to improving efficiency and effectiveness in these critical areas.