This inventor holds 1 USPTO granted patent. Top assignee: 3M Innovative Properties Company. Active years: 2003.
Company Filing History:
Years Active: 2003
Title: Larry A Zazzera: Innovator in Vapor Reactor Technology
Introduction
Larry A Zazzera is a notable inventor based in Edina, MN (US). He has made significant contributions to the field of semiconductor technology, particularly in the use of reactive gases for vapor reactors. His innovative approach has garnered attention for its potential to improve processes while minimizing environmental impact.
Latest Patents
Zazzera holds a patent for the "Use of perfluoroketones as vapor reactor cleaning, etching, and doping gases." This patent describes methods of using reactive gases containing a perfluoroketone with 4 to 7 carbon atoms. These methods are effective for removing unwanted deposits in vapor reactors, etching dielectric and metallic materials, and doping materials. The perfluoroketones he utilizes perform as well as or better than standard perfluorocarbons used in the semiconductor industry, while having minimal impact on global warming. He has 1 patent to his name.
Career Highlights
Zazzera is associated with 3M Innovative Properties Company, where he has been able to apply his expertise in vapor reactor technology. His work has contributed to advancements in the semiconductor industry, showcasing his commitment to innovation and environmental sustainability.
Collaborations
Throughout his career, Zazzera has collaborated with notable colleagues, including Michael G Costello and Fred E Behr. These partnerships have fostered a collaborative environment that encourages the exchange of ideas and technological advancements.
Conclusion
Larry A Zazzera's contributions to the field of semiconductor technology highlight his innovative spirit and dedication to improving industrial processes. His work with perfluoroketones represents a significant step forward in minimizing environmental impact while enhancing efficiency in vapor reactors.
