Company Filing History:
Years Active: 2004
Title: Larry A LaFollette: Innovator in Semiconductor Polishing Solutions
Introduction
Larry A LaFollette is an esteemed inventor located in Maumee, Ohio, known for his significant contributions to the semiconductor industry. With a focus on enhancing the chemical mechanical polishing (CMP) process, LaFollette's innovation demonstrates the potential for improved efficiency and effectiveness in semiconductor manufacturing.
Latest Patents
Larry A LaFollette holds a patent for a "Chemical mechanical polishing slurry composition for polishing conductive and non-conductive layers on semiconductor wafers." This innovative slurry composition includes a dispersion solution with an abrasive and an oxidizer. A key aspect of his invention is the large particle count of less than about 150,000 particles, featuring a particle size greater than 0.5 micrometers in 30 microliters of slurry, achieved through a pre-use filtering process. Furthermore, the addition of a chemical activity enhancer, such as an amine, alongside a corrosion inhibitor, allows for the desired copper removal rate without augmenting static etching rates.
Career Highlights
LaFollette's career is highlighted by his role at Planar Solutions, LLC, where he actively participates in the development of advanced CMP solutions. His dedication to innovation in this field allows him to address the complex challenges faced by semiconductor manufacturers effectively.
Collaborations
In his journey as an inventor, LaFollette has collaborated with talented professionals in the industry, including notable colleagues such as Anthony M Pasqualoni and Deepak Mahulikar. These collaborations underscore the importance of teamwork in driving progress and innovation in technology.
Conclusion
Larry A LaFollette stands out as a significant contributor to semiconductor technology through his innovative CMP slurry composition. His work not only demonstrates his inventive capabilities but also highlights the advancements made in the semiconductor industry, paving the way for more efficient manufacturing processes. The patent he holds illustrates the impact of diligent research and collaboration in advancing technological frontiers.