Company Filing History:
Years Active: 1985
Title: Innovations of Lance R Thompson in Microelectronic Thin Films
Introduction
Lance R Thompson is a notable inventor based in Ft. Collins, CO (US). He has made significant contributions to the field of microelectronics, particularly through his innovative patent related to chemical vapor deposition techniques. His work has implications for the development of advanced microelectronic devices.
Latest Patents
Lance R Thompson holds a patent for an invention titled "Electron beam induced chemical vapor deposition." This patent describes a new low-temperature method (50°C to 500°C) for depositing and growing microelectronic thin films. The method utilizes cold cathode electron beams to initiate and sustain both gas phase and surface chemical reactions. The electron beams generated by glow discharge electron guns play a crucial role in this process. The innovative approach allows for the decomposition of reactant molecules directly by electron impact and indirectly through vacuum ultraviolet radiation generated by rare gas electron collisions. This technique minimizes radiation damage while achieving high deposition and growth rates, making it suitable for in-line single wafer processing.
Career Highlights
Throughout his career, Lance R Thompson has focused on advancing the technology behind microelectronic films. His work has led to the development of methods for depositing insulators, conductors, and semiconductors, as well as growing native films such as oxides and nitrides. His innovative techniques have positioned him as a key figure in the field of microelectronics.
Collaborations
Lance R Thompson has collaborated with notable colleagues, including George J Collins and Jorge J Rocca. These partnerships have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Lance R Thompson's contributions to the field of microelectronics through his innovative patent on electron beam induced chemical vapor deposition highlight his role as a leading inventor. His work continues to influence the development of advanced microelectronic devices and techniques.