Treffen, Austria

Lach Otto


Average Co-Inventor Count = 2.0

ph-index = 1

Forward Citations = 2(Granted Patents)


Company Filing History:


Years Active: 2016

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1 patent (USPTO):Explore Patents

Title: Lach Otto: Innovator in Wafer Treatment Technology

Introduction

Lach Otto is a notable inventor based in Treffen, Austria. He has made significant contributions to the field of wafer treatment technology. His innovative approach has led to the development of a unique method and apparatus that enhances the processing of wafer-shaped articles.

Latest Patents

Lach Otto holds a patent for a "Method and apparatus for liquid treatment of wafer shaped articles." This invention involves a spin chuck designed to hold a wafer-shaped article in a specific orientation. The lower surface of the wafer is maintained at a predetermined distance from the upper surface of the spin chuck. A heating assembly, which includes at least one infrared heater, is positioned above the spin chuck. This assembly remains stationary while the spin chuck rotates, allowing for efficient treatment of the wafer.

Career Highlights

Lach Otto is currently employed at Lam Research AG, where he continues to innovate in the field of semiconductor manufacturing. His work focuses on improving processes that are critical to the production of high-quality wafers. With a patent portfolio that includes 1 patent, he has established himself as a key player in this specialized industry.

Collaborations

Lach collaborates with Karl-Heinz Hohenwarter, a fellow innovator in the field. Their combined expertise contributes to advancements in wafer treatment technologies.

Conclusion

Lach Otto's contributions to wafer treatment technology exemplify the spirit of innovation. His patented methods and ongoing work at Lam Research AG highlight his commitment to enhancing semiconductor manufacturing processes.

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