Kyung-sung Bae

Title: Innovations of Kyung-sung Bae

Introduction

Kyung-sung Bae is a notable inventor based in Kyungki-do, South Korea. He has made significant contributions to the field of exposure apparatus technology. His work focuses on enhancing the precision and efficiency of exposure methods used in semiconductor manufacturing.

Latest Patents

Kyung-sung Bae holds a patent for an "Advanced exposure apparatus and exposure method using the same." This innovative apparatus combines a quadrupole illumination system with an annular illumination system. It includes a light source, an adjusting portion with a filter to limit the emitted light, a refractive/diffractive portion for manipulating the light, and a focusing portion that directs the light onto a wafer. The design allows for a uniform light intensity distribution on the image formation plane while maintaining improved resolution. This advancement helps in forming nearly circular contact hole patterns, effectively reducing the proximity effect.

Career Highlights

Kyung-sung Bae is currently employed at Samsung Electronics Co., Ltd., a leading company in the technology sector. His work at Samsung has positioned him as a key player in the development of advanced semiconductor technologies.

Collaborations

He has collaborated with notable coworkers, including Jae-kwan Song and Jeong-kon Kim, who have contributed to his research and development efforts.

Conclusion

Kyung-sung Bae's innovative work in exposure apparatus technology exemplifies the advancements being made in the semiconductor industry. His contributions are paving the way for more efficient manufacturing processes and improved product quality.