KyuHa Shim

Title: KyuHa Shim: Innovator in Profile Modulation Technology

Introduction

KyuHa Shim is a notable inventor based in Gloucester, MA (US). He has made significant contributions to the field of ion implantation technology. His innovative work has led to the development of a unique system that enhances the efficiency of energy implants.

Latest Patents

KyuHa Shim holds a patent for a "System and technique for profile modulation using high tilt angles." This invention discloses a system and method that allows higher energy implants to be performed, wherein the peak concentration depth is shallower than would otherwise occur. The system comprises an ion source, an accelerator, a platen, and a platen orientation motor that allows large tilt angles. It is capable of performing implants of hydrogen ions at an implant energy of up to 5 MeV. By tilting the workpiece during an implant, the system can perform implants that are typically conducted at lower implant energies. Additionally, the resistivity profile of the workpiece after thermal treatment is similar to that achieved using a lower energy implant. In certain embodiments, the peak concentration depth may be reduced by 3 μm or more using larger tilt angles.

Career Highlights

KyuHa Shim is currently employed at Applied Materials, Inc., where he continues to advance his research and development efforts. His work has been instrumental in pushing the boundaries of ion implantation technology.

Collaborations

KyuHa has collaborated with notable colleagues such as Venkataramana R Chavva and Hans Gossmann, contributing to a dynamic research environment.

Conclusion

KyuHa Shim's innovative contributions to ion implantation technology exemplify the impact of dedicated inventors in advancing scientific knowledge and practical applications. His work continues to influence the field and inspire future innovations.