Company Filing History:
Years Active: 2022
Title: The Innovative Mind of Kyo-Hyeok Kim
Introduction
Kyo-Hyeok Kim, an accomplished inventor based in Seoul, South Korea, has made significant contributions to the field of plasma processing technologies. With two registered patents, his innovative work primarily focuses on enhancing the efficiency and control of plasma environments used in semiconductor manufacturing.
Latest Patents
Kyo-Hyeok Kim's latest patents exemplify his expertise in plasma processing apparatuses and systems. The first patent, titled "Plasma Processing Apparatus," describes an apparatus that includes a substrate chuck designed to support a substrate. This apparatus features a focus ring that surrounds the substrate’s perimeter and an edge block that supports the focus ring, which includes electrodes positioned to optimize plasma performance.
The second patent, "Method of Controlling Uniformity of Plasma and Plasma Processing System," details a groundbreaking method for enhancing plasma uniformity. This method involves generating first and second RF driving pulse signals using distinct frequencies and applying these to electrodes within a plasma chamber. The innovation lies in the harmonic control signal that modifies the RF driving pulses to improve the overall uniformity of plasma, contributing to better semiconductor processing.
Career Highlights
Kyo-Hyeok Kim is a notable inventor at Samsung Electronics Co., Ltd., where he leverages his expertise in plasma technology to advance the company's capabilities in semiconductor manufacturing processes. His years of experience and innovative thinking have positioned him as a key figure within his organization.
Collaborations
At Samsung Electronics, Kyo-Hyeok collaborates with other talented professionals, including fellow innovators Seung-Bo Shim and Min-Young Hur. Together, they work on a variety of projects aimed at enhancing semiconductor processing techniques, ensuring that their combined expertise fosters a continuous stream of innovation.
Conclusion
Kyo-Hyeok Kim's substantial contributions to plasma processing technology underscore his role as a leading inventor in the field. His dedication to innovation and collaboration with top professionals further solidify his impact at Samsung Electronics and the broader semiconductor industry as a whole. With his continued research and development efforts, Kyo-Hyeok Kim is undoubtedly a pioneer shaping the future of plasma technologies.