Kyeong Tae Lee

Title: Kyeong Tae Lee: Innovator in Device Manufacturing

Introduction

Kyeong Tae Lee is a notable inventor based in Los Gatos, CA (US). He has made significant contributions to the field of device manufacturing, holding a total of 3 patents. His innovative approaches have advanced the techniques used in the industry.

Latest Patents

One of Kyeong Tae Lee's latest patents is focused on a high lateral to vertical ratio etch process for device manufacturing. This process involves etching a layer stack over a substrate using a photoresist pattern deposited on the layer stack as a first mask. The photoresist pattern is in-situ cured using plasma, allowing for modifications to be made to at least a portion of the pattern through curing. In one embodiment, silicon by-products are formed on the photoresist pattern from the plasma. In another embodiment, carbon from the plasma is embedded into the photoresist pattern. Additionally, the plasma produces ultraviolet light to cure the photoresist pattern, which is then slimmed. The layer stack is subsequently etched using the slimmed photoresist pattern as a second mask.

Career Highlights

Kyeong Tae Lee is currently employed at Applied Materials, Inc., where he continues to develop innovative solutions in device manufacturing. His work has been instrumental in enhancing the efficiency and effectiveness of manufacturing processes.

Collaborations

Kyeong Tae Lee has collaborated with several talented individuals in his field, including Sang Wook Kim and Daehee Weon. These collaborations have fostered a creative environment that encourages innovation and the sharing of ideas.

Conclusion

Kyeong Tae Lee's contributions to device manufacturing through his patents and collaborations highlight his role as a leading inventor in the industry. His innovative techniques continue to shape the future of manufacturing processes.