Company Filing History:
Years Active: 2014-2022
Title: The Ingenious Work of Kwangwook Lee: Innovations in Substrate Cleaning and Semiconductor Fabrication
Introduction: Kwangwook Lee is an esteemed inventor based in Seongnam-si, South Korea, recognized for his contributions to the fields of substrate cleaning apparatus and semiconductor device fabrication. With two patents to his name, Lee has made significant strides in enhancing the efficiency and effectiveness of manufacturing processes.
Latest Patents:
Kwangwook Lee's recent innovations include two notable patents. The first patent, titled "Substrate cleaning apparatus and substrate cleaning method using the same," describes a sophisticated cleaning apparatus designed for substrates. This apparatus features a support structure within a chamber that holds the substrate securely. It incorporates a first nozzle that sprays a polymer and solvent onto the substrate to create an effective coating. Additionally, it utilizes a second nozzle that injects hot gas to volatilize the solvent from the coating and a third nozzle that applies a peeling treatment to facilitate the removal of the coating from the substrate. This innovative design optimizes the cleaning process, making it more efficient and effective.
The second patent, "Method of fabricating semiconductor device," outlines a procedural approach to semiconductor fabrication. This method includes the formation of a gate dielectric layer and at least one conductive layer on a substrate. By strategically etching the conductive layer using a mask, Lee’s method allows for the precise formation of a gate electrode. The innovation lies in selecting materials that ensure the byproduct formed during etching has a higher etch rate than the gate dielectric layer, thereby improving the overall manufacturing process.
Career Highlights: Kwangwook Lee is employed by Samsung Electronics Co., Ltd., a leading technology company known for its innovative products and contributions to the electronics industry. His work at Samsung has positioned him as a notable figure in the field of semiconductor technology.
Collaborations: Throughout his career, Kwangwook Lee has had the opportunity to collaborate with talented colleagues, including Jihoon Jeong and Mihyun Park. Their joint efforts have further advanced the research and development efforts at Samsung, contributing to the company’s reputation for excellence in innovation.
Conclusion: Kwangwook Lee's innovative patents in substrate cleaning and semiconductor fabrication underscore his importance as an inventor in the technology sector. With a commitment to enhancing manufacturing processes and a collaborative spirit, Lee continues to make valuable contributions that positively impact the industry.