This inventor holds 4 USPTO granted patents and 2 published patent applications and 1 EPO patent. Top assignee: Samsung Electronics Co., Ltd.. Active years: 2022-2026.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile
Company Filing History:
Years Active: 2022-2026
Title: Kwangho Lee: Innovator in Plasma Monitoring Systems
Introduction
Kwangho Lee is a prominent inventor based in Suwon, South Korea. He has made significant contributions to the field of semiconductor processing, holding a total of 4 patents. His innovative work focuses on plasma monitoring systems and methods that enhance the efficiency and accuracy of semiconductor manufacturing processes.
Latest Patents
One of Kwangho Lee's latest patents is a "Plasma monitoring system and method of monitoring plasma." This system includes a chamber designed for plasma processes on semiconductor substrates. It features a view window, a substrate stage, and a light transmitter that utilizes optical fibers to capture light generated during the plasma process. The system also incorporates a detachable reflection mirror and a light analyzer that corrects the light spectrum based on various light inputs.
Another notable patent is the "Semiconductor process device and method of monitoring semiconductor process." This device consists of a housing with a chamber for substrate processing and a viewport for observing the process. It includes an adapter for receiving reflected light, a polarization beam splitter, and a spectroscope for analyzing the light spectra. The control unit monitors the thickness of the structure on the substrate based on luminous intensity over time.
Career Highlights
Kwangho Lee has worked with leading companies in the technology sector, including Samsung Electronics Co., Ltd. and Samsung Electronics Ltd. His experience in these organizations has allowed him to develop and refine his innovative ideas in semiconductor technology.
Collaborations
Throughout his career, Kwangho Lee has collaborated with talented individuals such as Cheulhee Hahm and Jitae Park. These collaborations have contributed to the advancement of his research and the successful development of his patented technologies.
Conclusion
Kwangho Lee is a distinguished inventor whose work in plasma monitoring systems has significantly impacted the semiconductor industry. His innovative patents and collaborations highlight his commitment to advancing technology in this critical field.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile