Company Filing History:
Years Active: 1996-1998
Title: Innovations by Kusol Lee
Introduction
Kusol Lee is a notable inventor based in Gardena, CA (US). He has made significant contributions to the field of semiconductor technology, holding 2 patents that showcase his innovative approaches.
Latest Patents
One of Kusol Lee's latest patents is titled "Process for providing clean lift-off of sputtered thin film layers." This unique photoresist process achieves clean and complete lift-off of a thin film layer, such as a sputtered thin film formed on a photoresist above a semiconductor substrate. The process relies on a reentrant photoresist profile that breaks the continuity of the thin film layer, ensuring a clean lift-off. The desired photoresist profile can be obtained through a typical photoresist process preceded by an oxidation process on the semiconductor substrate's surface. This oxidation process provides a thin native oxide layer with a thickness ranging from about 30 to 50 angstroms. Notably, no extra processing steps involving dielectric film deposition and etch are required to achieve clean lift-off, which results in good visual and electrical yields.
Another significant patent by Kusol Lee is the "Method of fabricating a self-aligned double recess gate profile." This method involves forming a first mask layer over the substrate, followed by a second mask layer with an opening. An opening at least as wide as the second mask layer's opening is created through the first mask layer to expose the substrate beneath. A first recess is then etched in the semiconductor through the second mask layer's opening. The first mask layer's opening is uniformly expanded, allowing for the formation of a wider recess aligned to the first recess. This method is particularly applicable to the formation of self-aligned gate and channel recesses in a GaAs MESFET.
Career Highlights
Kusol Lee has worked at Hughes Aircraft Company, where he has applied his expertise in semiconductor technology to develop innovative solutions. His work has contributed to advancements in the field and has had a lasting impact on the industry.
Collaborations
Kusol Lee has collaborated with notable coworkers, including Tom Y Chi and Liping D Hou, who have also contributed to the field of semiconductor technology.
Conclusion
Kusol Lee's innovative patents and contributions to semiconductor technology highlight his role as a significant inventor in the industry. His work continues to