Kung-Hyon Nam

Title: Innovations of Kung-Hyon Nam in Semiconductor Technology

Introduction

Kung-Hyon Nam is a notable inventor based in Hwaseong, South Korea. He has made significant contributions to the field of semiconductor technology, holding a total of 2 patents. His work focuses on methods that enhance the manufacturing processes of semiconductor devices.

Latest Patents

Nam's latest patents include a "Method of forming recess and method of manufacturing semiconductor device having the same." This invention relates to a method that involves forming a field region defining an active region in a substrate. The active region extends in a first direction, while a preliminary recess is formed in a second direction, crossing the active region. The process includes plasma-oxidizing the substrate to create a sacrificial oxide layer and utilizing plasma etching to form a recess with a width larger than the preliminary recess. The etch rate of the active region is designed to be one to two times greater than that of the sacrificial oxide layer.

Another significant patent is the "Semiconductor device wiring and method of manufacturing the same." This invention describes a process where a first conductive layer is formed on a semiconductor substrate, followed by the deposition of a first insulation material. A CMP process is then implemented to form the first insulation layer, and a second insulation layer is deposited to cover any scratches formed during the CMP process. This method aims to prevent the formation of bridges between neighboring conductive patterns, thereby reducing defects in semiconductor devices.

Career Highlights

Kung-Hyon Nam is currently employed at Samsung Electronics Co., Ltd., where he continues to innovate in semiconductor technology. His work has been instrumental in advancing the efficiency and reliability of semiconductor manufacturing processes.

Collaborations

Nam has collaborated with notable colleagues, including Sung-Sam Lee and Joon-Seok Moon, contributing to various projects that enhance semiconductor technology.

Conclusion

Kung-Hyon Nam's contributions to semiconductor technology through his innovative patents demonstrate his expertise and commitment to advancing the field. His work at Samsung Electronics Co., Ltd. continues to influence the industry positively.