Company Filing History:
Years Active: 2024
Title: Innovations by Kui Hyun Yoon
Introduction
Kui Hyun Yoon is a notable inventor based in Yongin-si, South Korea. He has made significant contributions to the field of plasma processing technology. His work is particularly recognized for its application in semiconductor manufacturing.
Latest Patents
Kui Hyun Yoon holds a patent for a "Plasma processing apparatus and method for dechucking wafer in the plasma processing apparatus." This innovative apparatus includes a chamber where plasma processes are performed. It features an electrostatic chuck that supports a wafer, along with a first and second electrode designed to optimize the processing environment. The apparatus also includes a power supply for voltage application and cooling gas supply lines to maintain optimal wafer temperature.
Career Highlights
Yoon has established a successful career at Samsung Electronics Co., Ltd., where he has been instrumental in advancing plasma processing technologies. His expertise has contributed to the efficiency and effectiveness of semiconductor manufacturing processes.
Collaborations
Some of his notable coworkers include Yi Rop Kim and Yun Hwan Kim, who have collaborated with him on various projects within the company.
Conclusion
Kui Hyun Yoon's innovative work in plasma processing technology exemplifies the advancements being made in the semiconductor industry. His contributions continue to influence the field and enhance manufacturing processes.