Location History:
- Utsunomiya, JP (2022)
- Tochigi, JP (2023)
Company Filing History:
Years Active: 2022-2023
Title: Innovations by Kouki Miyano
Introduction
Kouki Miyano is a notable inventor based in Utsunomiya, Japan. He has made significant contributions to the field of semiconductor manufacturing, holding a total of 2 patents. His work focuses on improving the efficiency and accuracy of exposure apparatuses used in semiconductor device production.
Latest Patents
Miyano's latest patents include a method of manufacturing semiconductor devices. This method utilizes an exposure apparatus equipped with a reticle stage and a projection optical system. It involves a three-period process where substrates are exposed using different reticles. The method emphasizes controlling the temperature distribution of optical elements to minimize aberrations during exposure. Another patent details an exposure apparatus that features temperature controllers designed to manage optical element temperatures, thereby reducing aberrations during both exposure and non-exposure periods.
Career Highlights
Kouki Miyano is currently employed at Canon Kabushiki Kaisha, a leading company in imaging and optical products. His innovative approaches have contributed to advancements in semiconductor technology, enhancing the performance of exposure systems.
Collaborations
Miyano has collaborated with notable colleagues such as Takehiro Toyoda and Hiroaki Kobayashi. Their combined expertise has fostered a productive environment for innovation within their field.
Conclusion
Kouki Miyano's contributions to semiconductor manufacturing through his patents and collaborations highlight his role as a key innovator in the industry. His work continues to influence advancements in technology and manufacturing processes.