This inventor holds 3 USPTO granted patents. Top assignees: Mitsubishi Denki Kabushiki Kaisha, Mitsubishi Electric Engineering Company, Limited. Active years: 1991-2000.
Location History:
- Fukuoka, JP (1991)
- Hyogo, JP (2000)
- Tokyo, JP (2000)
Company Filing History:
3 out of 21,351 
2 out of 177 
Years Active: 1991-2000
Title: Kouji Oku - Innovator in Plasma Technology
Introduction
Kouji Oku is a notable inventor based in Hyogo, Japan. He has made significant contributions to the field of plasma technology, holding a total of 3 patents. His work focuses on improving plasma processing techniques, which are essential in various industrial applications.
Latest Patents
One of his latest patents is a plasma generating apparatus with multiple microwave introducing means. This innovative apparatus enhances the uniformity of plasma processing and accommodates larger substrate diameters. Microwaves are effectively distributed and emitted from a waveguide through branching portions of a T branch to four rod antennas. These microwaves are introduced into a vacuum vessel through four dielectric tubes. Within the vacuum vessel, a multi-cusp magnetic field and an electron cyclotron resonance region are established by permanent magnets. This interaction between the vibrational electric field of the microwaves and the magnetic field results in the generation of highly uniform plasma, which is crucial for effective plasma processing.
Another significant patent is the magnetically enhanced microwave plasma generating apparatus. This apparatus includes a waveguide for guiding microwaves and a vacuum vessel connected to the waveguide. The vacuum vessel is equipped with a gas supply for discharging electrons and a means for evacuation. A dielectric member, either tube-like or rod-like, is inserted into the vacuum vessel and is designed to emit microwaves. This design allows for the effective application of microwave electric power to high-density plasma, exceeding the so-called cut-off density, and helps to homogenize plasma distribution within the vacuum vessel.
Career Highlights
Kouji Oku has worked with prominent companies such as Mitsubishi Denki Kabushiki Kaisha and Mitsubishi Electric Engineering Company, Limited. His experience in these organizations has contributed to his expertise in plasma technology and innovation.
Collaborations
Some of his notable coworkers include Minoru Hanazaki and Kouichi Ono. Their collaboration has likely fostered advancements in the field of plasma technology.
Conclusion
Kouji Oku's contributions to plasma technology through his innovative patents and career experiences highlight his role as a significant inventor in this field. His work continues to influence advancements in plasma processing techniques.