Kotlanka Rama Krishna

Title: Kotlanka Rama Krishna and MEMS Innovation.

Introduction

Kotlanka Rama Krishna is an inventor based in Belmont, Massachusetts. Her patent work focuses on suspended microelectromechanical systems (MEMS) and methods for fabricating these devices.

Latest Patents

Rama Krishna’s listed patents address MEMS structures and their fabrication.

- Suspended Microelectromechanical System (MEMS) Devices describes a movable electromechanical device suspended within a dielectric cavity in a substrate. The cavity has a substantially planar bottom and perpendicular sidewalls, with rectilinear corners, while the movable device remains spaced from the cavity surfaces.

- Planar Processing of Suspended Microelectromechanical Systems (MEMS) Devices describes forming a material stack over a substrate and removing substrate material beneath it to create a cavity. The resulting device may include channels connecting its surface to the cavity, spacer material along channel sidewalls, and undercut regions. The process is designed to support highly planar stack layers.

She is associated with 2 patents.

Career Highlights

Rama Krishna is associated with Analog Devices International Unlimited Company. Her patent portfolio reflects work on MEMS device architecture and manufacturing processes, including cavity design, suspended structures, and planar fabrication.

Collaborations

Her listed coworkers include Seamus Paul Whiston and Lynn Khine. Their names indicate professional connections in the context of her work, though the supplied information does not specify particular joint projects.

Conclusion

Kotlanka Rama Krishna’s patents highlight contributions to suspended MEMS devices and fabrication techniques, with an emphasis on cavity structures and planar processing.