Kyoto, Japan

Kota Tanikawa


Average Co-Inventor Count = 3.0

ph-index = 1

Forward Citations = 5(Granted Patents)


Company Filing History:


Years Active: 2022-2025

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3 patents (USPTO):Explore Patents

**Title: Innovations of Kota Tanikawa: Pioneering Substrate Processing Technology**

Introduction

Kota Tanikawa, an accomplished inventor based in Kyoto, Japan, has made significant contributions to the field of substrate processing. With a total of two patents to his name, Tanikawa has developed innovative solutions that advance the capabilities of semiconductor manufacturing and other related technologies.

Latest Patents

Among his notable inventions, Tanikawa's latest patents include a substrate processing device and substrate processing method. This advanced apparatus features a nozzle designed to spout sulfuric acid and hydrogen peroxide-based solutions (referred to as SPM) onto substrates effectively. The device incorporates a mixing portion that communicates with the nozzle and a supply mechanism for managing the sulfuric acid-containing liquid. Notably, the control device orchestrates key processes such as the recovery and preparation of the sulfuric acid-containing liquid, ensuring efficiency and precision in the substrate processing steps.

Career Highlights

Currently, Kota Tanikawa is employed at Screen Holdings Co., Ltd., a company recognized for its innovations in semiconductor equipment and advanced imaging technology. His work contributes to enhancing the performance and sustainability of substrate processing methods, thereby supporting technological advancements in various industries.

Collaborations

Throughout his career, Tanikawa has collaborated with esteemed colleagues, including Kenji Kawaguchi and Toru Endo. These partnerships have fostered a collective effort toward innovation and development, enhancing the capabilities of their projects and pushing the boundaries of substrate technology.

Conclusion

In conclusion, Kota Tanikawa stands out as a prominent inventor in the substrate processing arena. His groundbreaking patents reflect his commitment to innovation and excellence in technology. As he continues to work at Screen Holdings Co., Ltd., Tanikawa's contributions will undoubtedly influence future developments in the industry, paving the way for more efficient manufacturing processes and technological advancements.

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