Location History:
- Kasugai, JP (1994)
- Okazaki, JP (1997 - 2001)
Company Filing History:
Years Active: 1994-2001
Title: Koki Mizuno: Innovator in Silicon Etching Technologies
Introduction
Koki Mizuno is a notable inventor based in Okazaki, Japan. He has made significant contributions to the field of semiconductor technology, particularly in the area of silicon etching methods. With a total of 5 patents to his name, Mizuno's work has advanced the efficiency and effectiveness of silicon substrate processing.
Latest Patents
Mizuno's latest patents include an innovative electrochemical etching method for silicon substrates with PN junctions. This method allows for the smoothing of the etching surface of (110)-oriented silicon. The process involves immersing a silicon wafer in a KOH solution, where a platinum electrode plate is positioned to face the silicon wafer. A constant voltage power source, ammeter, and contact are connected in series to facilitate the etching process. The controller initiates etching from the surface with the PN junction and terminates voltage application after a specified time, ensuring the formation of an anodic oxide film is balanced with the etching process. The controller also monitors the current flow to determine the equilibrium state during etching.
Another significant patent by Mizuno focuses on an etching method for silicon substrates and semiconductor sensors. This method shares similarities with his previous patent, emphasizing the importance of achieving a smooth etching surface for (110)-oriented silicon wafers.
Career Highlights
Throughout his career, Koki Mizuno has worked with prominent companies such as Nippondenso Co., Ltd. and Denso Corporation. His experience in these organizations has contributed to his expertise in semiconductor technologies and innovations.
Collaborations
Mizuno has collaborated with notable colleagues in the field, including Yasutoshi Suzuki and Hiroshi Okada. These partnerships have likely fostered a collaborative environment that encourages innovation and the sharing of ideas.
Conclusion
Koki Mizuno's contributions to silicon etching technologies have made a significant impact on the semiconductor industry. His innovative methods and collaborative efforts continue to influence advancements in this critical field.